MASKLESS LITHOGRAPHY
Technology
Principle
Our brand-new Smart Print UV (SP-UV) maskless lithography system uses a Digital Micromirror Device (DMD) technology It gives user a straightforward way to move from the design directly to the patterned sample without the use of the standard photomask fabrication.
No needs of photomask means more flexibility, and faster overall fabrication time.
Alignment
SP-UV is equipped with a 385 nm LED source to be compatible with standard g-, h- and i-line photoresists (such as SU-8).
SP-UV also integrates a secondary yellow LED source coupled with a feedback camera for focusing, inspection and alignment procedure.
Resolution
Our quick-release objective technology gives user access to four different writing resolution to combine writing precision and speed.
Our objective range has been carefully selected with a large working distance (up to 3 cm) to make SP-UV compatible with non-standard substrates (non-flat, flexible, thick).
Scientific publications
The Microlight3D maskless lithography technology
was used for the following publications:
Topological defects at smectic interfaces as a potential tool for the biosensing of living microorganisms — June 2023
Backward Acoustic Waves in Piezoelectric Plates: Possible Application as Base for Liquid Sensors — January 2023
